Silicon photonics process simplification - grating mask reduction

In Silicon Photonics, grating couplers are used as a surface-coupling optical component for guiding light in a preferential direction for process control. However, edge couplers can achieve rather high coupling efficiency, broad bandwidth, and polarization independence, which are normally used...

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Bibliographic Details
Main Author: Li, Aolin
Other Authors: Tang Xiaohong
Format: Thesis-Master by Coursework
Language:English
Published: Nanyang Technological University 2025
Subjects:
Online Access:https://hdl.handle.net/10356/182802