Controller design for nonlinear micromachined parallel plate actuators
The use of electrostatic actuation for microelectromechanical systems (MEMS) is attractive because of the high energy densities and large forces available in microscale devices. Nonlinear micromachined electrostatic parallel plate microactuators which work by electrostatic actuation, play an importa...
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| Format: | Thesis |
| Language: | English |
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2009
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| Online Access: | https://hdl.handle.net/10356/19275 |