Fabrication and characterization of low-temperature poly-si TFTs for AMLCD
The objective of this project was to develop a low temperature poly-Si TFT fabrication process based on the existing clean room facilities at Micro-Fabrication Laboratory in NTU. Low temperature poly-Si TFTs were mainly used for active matrix display applications.
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| Format: | Thesis |
| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/10356/19343 |