Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System
The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention recently due to its unique features: the arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through,...
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| Format: | Thesis |
| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/10356/19595 |