Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System
The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention recently due to its unique features: the arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through,...
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| Format: | Thesis |
| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/10356/19595 |
| _version_ | 1811678119769145344 |
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| author | Ye, Qian. |
| author2 | Shi, Xu |
| author_facet | Shi, Xu Ye, Qian. |
| author_sort | Ye, Qian. |
| collection | NTU |
| description | The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention recently due to its unique features: the arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, while those neutral particles moving in straight lines are filtered away, and a "purified" plasma is obtained at the other end. Thin films, such as Tetrahedral Amorphous Carbon (ta-C) films prepared by this method exhibit superior properties. An improved drift approximation model with an added radial electrostatic field has been successfully coded and implemented on computer in this thesis. The model provides an efficient way to quantitatively describe the plasma motion and predict the plasma behaviour in the toroidal solenoid of the Filtered Cathodic Vacuum Arc (FCVA) system. This thesis gives an introduction of the FCVA technique and modified drift collision model. |
| first_indexed | 2024-10-01T02:48:12Z |
| format | Thesis |
| id | ntu-10356/19595 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T02:48:12Z |
| publishDate | 2009 |
| record_format | dspace |
| spelling | ntu-10356/195952023-07-04T15:26:10Z Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System Ye, Qian. Shi, Xu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Computer hardware, software and systems The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention recently due to its unique features: the arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, while those neutral particles moving in straight lines are filtered away, and a "purified" plasma is obtained at the other end. Thin films, such as Tetrahedral Amorphous Carbon (ta-C) films prepared by this method exhibit superior properties. An improved drift approximation model with an added radial electrostatic field has been successfully coded and implemented on computer in this thesis. The model provides an efficient way to quantitatively describe the plasma motion and predict the plasma behaviour in the toroidal solenoid of the Filtered Cathodic Vacuum Arc (FCVA) system. This thesis gives an introduction of the FCVA technique and modified drift collision model. Master of Engineering 2009-12-14T06:17:04Z 2009-12-14T06:17:04Z 1997 1997 Thesis http://hdl.handle.net/10356/19595 en NANYANG TECHNOLOGICAL UNIVERSITY 149 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Computer hardware, software and systems Ye, Qian. Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title | Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title_full | Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title_fullStr | Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title_full_unstemmed | Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title_short | Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System |
| title_sort | numerical modeling and computer simulation for the design of a filtered cathodic arc system |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Computer hardware, software and systems |
| url | http://hdl.handle.net/10356/19595 |
| work_keys_str_mv | AT yeqian numericalmodelingandcomputersimulationforthedesignofafilteredcathodicarcsystem |