Diamond film growth by microwave plasma enhanced chemical vapour deposition
Diamond particles and continuous films have been successfully grown by Microwave Plasma Enhanced Chemical Vapour Deposition (MPECVD). The particles and films were characterised using scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman spectroscopy. Current-Voltage measurement...
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| Formato: | Tesis |
| Lenguaje: | English |
| Publicado: |
2009
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| Acceso en línea: | http://hdl.handle.net/10356/19689 |