Diamond film growth by microwave plasma enhanced chemical vapour deposition

Diamond film growth by microwave plasma enhanced chemical vapour deposition

Diamond particles and continuous films have been successfully grown by Microwave Plasma Enhanced Chemical Vapour Deposition (MPECVD). The particles and films were characterised using scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman spectroscopy. Current-Voltage measurement...

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Bibliographic Details
Main Author: Tan, Fong Hock.
Other Authors: Jaeshin, Ahn
Format: Thesis
Language:English
Published: 2009
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:http://hdl.handle.net/10356/19689

Internet

http://hdl.handle.net/10356/19689

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