Demonstration lithography using plasma focus soft x-ray source

To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.

Bibliographic Details
Main Authors:	Lee, Sing, Wong, Terence Kin Shun, Feng, Xianping, Lee, Paul Choon Keat, Springham, Stuart V., Serban, Adrian, Liu, Mahe, Kudryashov, Vladimir, Gribkov, Vladimir A., Rajdeep Singh Rawat
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Online Access:	http://hdl.handle.net/10356/3044

Internet

http://hdl.handle.net/10356/3044