Demonstration lithography using plasma focus soft x-ray source
To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.
| Main Authors: | , , , , , , , , , |
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/3044 |
| _version_ | 1811678362345668608 |
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| author | Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat |
| author_sort | Lee, Sing |
| collection | NTU |
| description | To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists. |
| first_indexed | 2024-10-01T02:52:03Z |
| format | Research Report |
| id | ntu-10356/3044 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T02:52:03Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/30442023-03-04T03:19:41Z Demonstration lithography using plasma focus soft x-ray source Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists. RG 12/97 2008-09-17T09:19:24Z 2008-09-17T09:19:24Z 2000 2000 Research Report http://hdl.handle.net/10356/3044 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat Demonstration lithography using plasma focus soft x-ray source |
| title | Demonstration lithography using plasma focus soft x-ray source |
| title_full | Demonstration lithography using plasma focus soft x-ray source |
| title_fullStr | Demonstration lithography using plasma focus soft x-ray source |
| title_full_unstemmed | Demonstration lithography using plasma focus soft x-ray source |
| title_short | Demonstration lithography using plasma focus soft x-ray source |
| title_sort | demonstration lithography using plasma focus soft x ray source |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging |
| url | http://hdl.handle.net/10356/3044 |
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