Resolving and guardbanding backend impact for poly plug incomplete barrier contact for SDRAM
Aggressive downscaling leads to increasing density for DRAM (Dynamic Random Access Memory) chips, resulting in higher probability of failure. In this MSc dissertation a key process issue, poly plug incomplete barrier contact (IBC) related to a DRAM yield loss of 3-4% was explored. Both electrical fa...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/3339 |