Fabrication and characterization of tetrahedral amorphous carbon films for some applications

The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp co...

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Bibliographic Details
Main Author: Cheah, Li Kang.
Other Authors: Shi, X.
Format: Thesis
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/3426