Fabrication and characterization of tetrahedral amorphous carbon films for some applications
The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp co...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/3426 |
| _version_ | 1811693135109029888 |
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| author | Cheah, Li Kang. |
| author2 | Shi, X. |
| author_facet | Shi, X. Cheah, Li Kang. |
| author_sort | Cheah, Li Kang. |
| collection | NTU |
| description | The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp content in the film is the carbon ion energy and the deposition rate. About 88 % of the carbon atoms in the ta-C film deposited with the optimum condition are tetrahedrally bonded which is the same bonding structure as diamond. |
| first_indexed | 2024-10-01T06:46:52Z |
| format | Thesis |
| id | ntu-10356/3426 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T06:46:52Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/34262023-07-04T15:17:17Z Fabrication and characterization of tetrahedral amorphous carbon films for some applications Cheah, Li Kang. Shi, X. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials The filtered cathodic vacuum arc (FCVA) technique has proved to be a promising method for deposition of high quality and large uniformity tetrahedral amorphous carbon (ta-C) films on different substrate materials at room temperature. Our study shows that the predominant factor to determine the sp content in the film is the carbon ion energy and the deposition rate. About 88 % of the carbon atoms in the ta-C film deposited with the optimum condition are tetrahedrally bonded which is the same bonding structure as diamond. Doctor of Philosophy (EEE) 2008-09-17T09:29:55Z 2008-09-17T09:29:55Z 1999 1999 Thesis http://hdl.handle.net/10356/3426 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Cheah, Li Kang. Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title | Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title_full | Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title_fullStr | Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title_full_unstemmed | Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title_short | Fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| title_sort | fabrication and characterization of tetrahedral amorphous carbon films for some applications |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials |
| url | http://hdl.handle.net/10356/3426 |
| work_keys_str_mv | AT cheahlikang fabricationandcharacterizationoftetrahedralamorphouscarbonfilmsforsomeapplications |