Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films
216 p.
Main Author: | |
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Other Authors: | |
Format: | Thesis |
Published: |
2010
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Online Access: | https://hdl.handle.net/10356/35963 |
216 p.
Main Author: | |
---|---|
Other Authors: | |
Format: | Thesis |
Published: |
2010
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/35963 |