Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films

Plasma assisted deposition of Ti-Si-N and Ti-Si-N-O diffusion barrier films

216 p.

Bibliographic Details
Main Author:	Ee, Elden Yong Chiang
Other Authors:	Chen Zhong
Format:	Thesis
Published:	2010
Subjects:	DRNTU::Engineering::Materials::Plasma treatment
Online Access:	https://hdl.handle.net/10356/35963

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