Fabrication of micro structure for micro systems

79 p.

Bibliographic Details
Main Author:	Kaliyaperumal Boobalan
Other Authors:	Zhong Zhaowei
Format:	Thesis
Published:	2010
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/36061

Internet

http://hdl.handle.net/10356/36061