Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

261 p.

Bibliographic Details
Main Author:	Chen, Bangtao
Other Authors:	Wang Shao
Format:	Thesis
Published:	2010
Subjects:	DRNTU::Engineering::Manufacturing::Product design
Online Access:	https://hdl.handle.net/10356/36128

Internet

https://hdl.handle.net/10356/36128