Significance of process exhaust system on wafer fab operation and its performance improvement
The technological advances, in IC manufacturing, imposes stringent conditions on the production environment, cost and time. The challenge to the Fab designer is to develop a facility, which can satisfy these increasing demands. Semiconductor fabrication is an energy-intensive manufacturing process,...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/3624 |