Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.

Bibliographic Details
Main Author:	Chen, Xiaofeng.
Other Authors:	Zhu, Weiguang
Format:	Thesis
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/3882

Internet

http://hdl.handle.net/10356/3882