Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.

Bibliographic Details
Main Author: Chen, Xiaofeng.
Other Authors: Zhu, Weiguang
Format: Thesis
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/3882

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