Fabrication and characterization of composite diamond like carbon films for some applications

The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.

Detalles Bibliográficos
Autor principal: Zhang, Ping
Otros Autores: Tay Beng Kang
Formato: Tesis
Publicado: 2008
Materias:
Acceso en línea:https://hdl.handle.net/10356/3991