Fabrication and characterization of composite diamond like carbon films for some applications

Fabrication and characterization of composite diamond like carbon films for some applications

The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.

Manylion Llyfryddiaeth
Prif Awdur: Zhang, Ping
Awduron Eraill: Tay Beng Kang
Fformat: Traethawd Ymchwil
Cyhoeddwyd: 2008
Pynciau:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Mynediad Ar-lein:https://hdl.handle.net/10356/3991

Rhyngrwyd

https://hdl.handle.net/10356/3991

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