Fabrication and characterization of composite diamond like carbon films for some applications
The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/3991 |
| _version_ | 1811694426386333696 |
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| author | Zhang, Ping |
| author2 | Tay Beng Kang |
| author_facet | Tay Beng Kang Zhang, Ping |
| author_sort | Zhang, Ping |
| collection | NTU |
| description | The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system. |
| first_indexed | 2024-10-01T07:07:23Z |
| format | Thesis |
| id | ntu-10356/3991 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T07:07:23Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/39912023-07-04T16:57:37Z Fabrication and characterization of composite diamond like carbon films for some applications Zhang, Ping Tay Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:42:00Z 2008-09-17T09:42:00Z 2005 2005 Thesis Zhang, P. (2005). Fabrication and characterization of composite diamond like carbon films for some applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3991 10.32657/10356/3991 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Zhang, Ping Fabrication and characterization of composite diamond like carbon films for some applications |
| title | Fabrication and characterization of composite diamond like carbon films for some applications |
| title_full | Fabrication and characterization of composite diamond like carbon films for some applications |
| title_fullStr | Fabrication and characterization of composite diamond like carbon films for some applications |
| title_full_unstemmed | Fabrication and characterization of composite diamond like carbon films for some applications |
| title_short | Fabrication and characterization of composite diamond like carbon films for some applications |
| title_sort | fabrication and characterization of composite diamond like carbon films for some applications |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | https://hdl.handle.net/10356/3991 |
| work_keys_str_mv | AT zhangping fabricationandcharacterizationofcompositediamondlikecarbonfilmsforsomeapplications |