Fabrication and characterization of composite diamond like carbon films for some applications
The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.
Main Author: | Zhang, Ping |
---|---|
Other Authors: | Tay Beng Kang |
Format: | Thesis |
Published: |
2008
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/3991 |
Similar Items
-
Electrochemical characteristics of diamond-like carbon thin films
by: Koh, Chin Chong.
Published: (2009) -
Mechanical and tribological properties of nitrogen doped diamond-like carbon thin films
by: Dinesh Krishna Mohan
Published: (2010) -
Design and fabrication of an improved filtered cathodic vacuum ARC (FCVA) deposition system for tetrahedral amorphous carbon (TA-C) films
by: Tay, Beng Kang
Published: (2008) -
Sr(Ti1-xFex)O3-[delta] film fabrication for photocatalytic applications
by: Wang, Lulu.
Published: (2008) -
Characterization of amorphous silicon carbide thin films for display applications
by: Ahn, Jaeshin, et al.
Published: (2008)