Deposition and characterization of carbon thin films by varying substrate bias and temperature
The carbon film composition in terms of sp2 or sp3 can differs by varying different deposition techniques and/or parameters. In this project, Filtered Cathodic Vacuum Arc (FCVA) deposition technique is used while in-situ substrate bias and temperature are being varied. For substrate bias, there may...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2010
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| Online Access: | http://hdl.handle.net/10356/40026 |