Event-based manufacturing modeling for design of a smart equipment management system (SEMS) for semiconductor industry

In semiconductor manufacturing, the role of maintenance is gradually being recognized as an important factor in reducing the equipment downtime and ensuring that the equipment operates optimally to produce good quality parts with acceptable yield and throughput levels. Maintenance strategy of highly...

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Detalles Bibliográficos
Autor Principal: Zhao, Xian.
Outros autores: Xie, Lihua
Formato: Thesis
Publicado: 2008
Subjects:
Acceso en liña:http://hdl.handle.net/10356/4031