Design and fabrication of an optical accelerometer using silicon micro-machining
The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4143 |