Nanocrystal formation for non-volatile memory application
This dissertation focuses on the formation of nanocrystals and integration with high-k dielectrics to address the gate stack and voltage scaling issues for future generation flash memory. Several concepts for improved device performance were discussed, including the introduction of new materials, pr...
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| Format: | Thesis |
| Language: | English |
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2010
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| Online Access: | https://hdl.handle.net/10356/42098 |