Parylene as a dielectric layer in a field effect transistor (FET)

The objective of this project is to develop the parylene coating system for transistor dielectric application in Crystal Growth Lab. This will include the optimization of parameters so that good quality parylene films can be deposited. Experiments will be conducted to determine the relationship betw...

全面介绍

书目详细资料
主要作者: Kan, Wai Hoong.
其他作者: Christian Leo Kloc
格式: Final Year Project (FYP)
语言:English
出版: 2010
主题:
在线阅读:http://hdl.handle.net/10356/42451