Analysis of mesoporous ultra low K dielectric materials for microelectronic interconnects

The project analysed the mesoporous ultra low K dielectric materials for microelectronic interconnects.

Bibliographic Details
Main Author:	Goh, Tat Kean.
Other Authors:	Wong, Terence Kin Shun
Format:	Thesis
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4303

Internet

http://hdl.handle.net/10356/4303