Plasma induced quantum well intermixing for photonic integration
In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration...
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/4350 |