Fabrication and properties of amorphous and textured carbon film

The effect of deposition parameters on the microstructures of amorphous carbon film is studied. It was shown that the sp2 fraction in amorphous carbon depends on the substrate bias voltage. Increasing substrate bias voltage results in decreasing G peak position in Raman spectra which implies sp2 fra...

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Bibliographic Details
Main Author: Thong, Kar Wui
Other Authors: Tay Beng Kang
Format: Final Year Project (FYP)
Language:English
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/10356/45227