Measurement of stress evolution in pulse-reverse electrochemical deposition using Micro-Raman Spectroscopy

Nowadays, copper deposit is extensively used in microelectronic applications, because the electroplated copper exhibits excellent electrical conductivity along with high hardness. in the resent literature, it is known that copper electroplated with pulse reverse current produces larger hardness than...

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Bibliographic Details
Main Author: Yang, Qi Hua
Other Authors: Miao Jianmin
Format: Final Year Project (FYP)
Language:English
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/10356/45821