Study of SIC oxidation for device application

167 p.

Bibliographic Details
Main Author:	Zhao, Pan
Other Authors:	Rusli
Format:	Thesis
Published:	2011
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	https://hdl.handle.net/10356/46856

Internet

https://hdl.handle.net/10356/46856