Reliable and high speed RF MEMS switches with wafer-scale encapsulation

181 p.

Bibliographic Details
Main Author:	Ke, Feixiang
Other Authors:	Miao Jianmin
Format:	Thesis
Published:	2011
Subjects:	DRNTU::Engineering::Mechanical engineering
Online Access:	https://hdl.handle.net/10356/47243

Internet

https://hdl.handle.net/10356/47243