Reliable and high speed RF MEMS switches with wafer-scale encapsulation
181 p.
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| Other Authors: | |
| Format: | Thesis |
| Published: |
2011
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| Online Access: | https://hdl.handle.net/10356/47243 |
| _version_ | 1811683523977805824 |
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| author | Ke, Feixiang |
| author2 | Miao Jianmin |
| author_facet | Miao Jianmin Ke, Feixiang |
| author_sort | Ke, Feixiang |
| collection | NTU |
| description | 181 p. |
| first_indexed | 2024-10-01T04:14:06Z |
| format | Thesis |
| id | ntu-10356/47243 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T04:14:06Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/472432023-03-11T17:49:52Z Reliable and high speed RF MEMS switches with wafer-scale encapsulation Ke, Feixiang Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering 181 p. The tremendously fast expansion of wireless and satellite communication systems in the information age is without parallel in history, leading to increase in the demand for miniaturized communication systems with smaller sizes, lighter weights, better functionalities and higher reliabilities. RF MEMS are widely recognized as enabling technologies for the miniaturization due to their promising characteristics of broadband operation, low power consumption and insertion loss, high isolation, and excellent signal linearity. In the past decade, RF MEMS switches are receiving much more attention for communication systems including tuneable matching networks, phase shifters, resonators, and reconfigurable filters. Nevertheless, challenges remain for the RF switches, restricting their applications in many systems. Reliability, packaging, switching speed, and power handling are among the common challenges shared by MEMS switches. DOCTOR OF PHILOSOPHY (MAE) 2011-12-27T06:42:18Z 2011-12-27T06:42:18Z 2009 2009 Thesis Ke, F. (2009). Reliable and high speed RF MEMS switches with wafer-scale encapsulation. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/47243 10.32657/10356/47243 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Ke, Feixiang Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title | Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title_full | Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title_fullStr | Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title_full_unstemmed | Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title_short | Reliable and high speed RF MEMS switches with wafer-scale encapsulation |
| title_sort | reliable and high speed rf mems switches with wafer scale encapsulation |
| topic | DRNTU::Engineering::Mechanical engineering |
| url | https://hdl.handle.net/10356/47243 |
| work_keys_str_mv | AT kefeixiang reliableandhighspeedrfmemsswitcheswithwaferscaleencapsulation |