Reliable and high speed RF MEMS switches with wafer-scale encapsulation
181 p.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/47243 |
181 p.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Published: |
2011
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/47243 |