Reliable and high speed RF MEMS switches with wafer-scale encapsulation

Reliable and high speed RF MEMS switches with wafer-scale encapsulation

181 p.

ग्रंथसूची विवरण
मुख्य लेखक:	Ke, Feixiang
अन्य लेखक:	Miao Jianmin
स्वरूप:	थीसिस
प्रकाशित:	2011
विषय:	DRNTU::Engineering::Mechanical engineering
ऑनलाइन पहुंच:	https://hdl.handle.net/10356/47243

समान संसाधन

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RF MEMS switches : survey and analysis
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Reconfigurable patch antenna by RF MEMS switches
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Study and analysis of different contact materials for ohmic RF MEMS switch
द्वारा: Raihanah Abdul Razak
प्रकाशित: (2011)

Development of key wafer-level packaging technologies and design rules for MEMS and biomedical MEMS
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Modelling of a mems microphone using wafer bonding technology
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प्रकाशित: (2011)

Design and fabrication of single wafer mems accelerometers with optimized flexures
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RF MEMs devices development for telecommunications
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प्रकाशित: (2008)

Tunable bandpass filter using RF MEMS switches
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Scalable model of on-wafer interconnects for high-speed CMOS ICs
द्वारा: Shi, Xiaomeng, और अन्य
प्रकाशित: (2009)

Reliability study on SSL under high speed switching condition
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प्रकाशित: (2012)

High-G inertial MEMS accelerometers
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प्रकाशित: (2015)

High-isolation and low-loss RF MEMS shunt switches
द्वारा: Jaafar, Haslina, और अन्य
प्रकाशित: (2010)

A comprehensive study on RF MEMS switch
द्वारा: Jaafar, Haslina, और अन्य
प्रकाशित: (2014)

Reconfigurable patch antenna by RF mems switches
द्वारा: Alam, A. H. M. Zahirul, और अन्य
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Design and fabrication of RF devices by novel MEMS technologies
द्वारा: Sun, Jianbo
प्रकाशित: (2010)

RF-MEMS based oscillators
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प्रकाशित: (2012)

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प्रकाशित: (2013)

Flatness and warpage measurement of semiconductor wafers
द्वारा: Ang, Mun Ru
प्रकाशित: (2019)

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प्रकाशित: (2009)

Design and fabrication of MEMS optical switches
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प्रकाशित: (2008)

Basic design of RF switch using MEMS technology /
द्वारा: 364342 Ahmad Hazry Idrus
प्रकाशित: (2006)

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प्रकाशित: (2011)

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A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch
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प्रकाशित: (2018)

Design and development of MEMs rotary fans
द्वारा: Keramati, Hamed
प्रकाशित: (2010)

Study on the improvement of silicon wafering using diamond wire process
द्वारा: Padmanabh Bagaria
प्रकाशित: (2013)

Investigation of silicon-based encapsulation for MEMS structures using epi-based processing
द्वारा: Oh, Yun Sheng.
प्रकाशित: (2009)

Integrated MEMS technology in transducer system and RF selective device for wireless communication application
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प्रकाशित: (2008)

Monolithic CMOS-MEMS integration for high-g accelerometers
द्वारा: Narasimhan, Vinayak, और अन्य
प्रकाशित: (2015)

Development of MEMS airflow sensors
द्वारा: Abdul Rahman Mohd Hassan
प्रकाशित: (2011)

Grinding of silicon wafer for molding applications
द्वारा: Sia, Kai Ming.
प्रकाशित: (2011)

Basic design of RF switch using MEMS technology / [microfilm]
द्वारा: Ahmad Hazry Idrus
प्रकाशित: (2006)

Development of Broadband Low Actuation Voltage RF MEM Switches
द्वारा: S. C. Shen, और अन्य
प्रकाशित: (2002-01-01)

Improvement on within wafer and wafer-to-wafer uniformity by chemical mechanical polishing (CMP)
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प्रकाशित: (2008)

Design and analysis of microelectromechanical (MEMS) vibration isolator
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प्रकाशित: (2012)

Methods to obtain varying densities of Ag nanoparticles on YSZ silicon wafer
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प्रकाशित: (2013)