Characterization of silicon nanocrystals embedded in SiO2 matrix

In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.

Detalhes bibliográficos
Autor principal: Liu, Yang
Outros Autores: Chen Tupei
Formato: Tese
Publicado em: 2008
Assuntos:
Acesso em linha:https://hdl.handle.net/10356/4750