A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing
This thesis reports theoretical and experimental study of piezoelectric microdiaphragm platform for physical and biological sensing. The microdiaphragms were first designed and then fabricated by MEMS fabrication processes. Their different characteristics such as frequency behavior, mode shapes, cou...
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| Format: | Thesis |
| Language: | English |
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2012
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| Online Access: | https://hdl.handle.net/10356/47725 |