Characterisation of silicon-based materials for surface micromachined uncooled infrared microbolometer

This thesis reports the design, fabrication and characterization of silicon-based materials for uncooled infrared microbolometer applications.

Bibliographic Details
Main Author:	Lo, Chee Wai.
Other Authors:	Tse, Man Siu
Format:	Thesis
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/4791

Internet

http://hdl.handle.net/10356/4791