Design of miniaturized inertia measurement unit

Micro-machined electromechanical systems (MEMS) industry has seen rapid development and gained wide popularity. A particular segment which has exceptional growth is in the field of inertial MEMs. This is due to the integration of sensors into daily consumer products like cell phones, cameras and eve...

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Bibliographic Details
Main Author: Yuan, Weiming.
Other Authors: Li King Ho Holden
Format: Final Year Project (FYP)
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/10356/49361