Novel quantum well intermixing technique using gray mask technology for photonic integrated circuits
In this thesis, a low energy shallow ion implantation induced disordering process has been developed in order to tune the energy bandgap shift in InGaAs/InGaAsP multiple quantum well laser structures.
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4961 |