Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters
This project is carried out with the main purpose of improving line-width uniformity and deviation across each wafer through optimization of the photolithography processes. In order to remain price competitive in the chip market, this project is also aimed at reducing production costs.
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| Other Authors: | |
| Format: | Thesis |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4999 |
| _version_ | 1826113537094713344 |
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| author | Ong, Eunice Ho Hui. |
| author2 | Zhu, Weiguang |
| author_facet | Zhu, Weiguang Ong, Eunice Ho Hui. |
| author_sort | Ong, Eunice Ho Hui. |
| collection | NTU |
| description | This project is carried out with the main purpose of improving line-width uniformity
and deviation across each wafer through optimization of the photolithography
processes. In order to remain price competitive in the chip market, this project is also
aimed at reducing production costs. |
| first_indexed | 2024-10-01T03:24:50Z |
| format | Thesis |
| id | ntu-10356/4999 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T03:24:50Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/49992023-07-04T16:38:49Z Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters Ong, Eunice Ho Hui. Zhu, Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging This project is carried out with the main purpose of improving line-width uniformity and deviation across each wafer through optimization of the photolithography processes. In order to remain price competitive in the chip market, this project is also aimed at reducing production costs. Master of Science (Microelectronics) 2008-09-17T10:02:59Z 2008-09-17T10:02:59Z 2005 2005 Thesis http://hdl.handle.net/10356/4999 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Ong, Eunice Ho Hui. Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title | Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title_full | Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title_fullStr | Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title_full_unstemmed | Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title_short | Improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| title_sort | improvement on the uniformity and deviation of structured patterns for surface acoustic wave filters |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging |
| url | http://hdl.handle.net/10356/4999 |
| work_keys_str_mv | AT ongeunicehohui improvementontheuniformityanddeviationofstructuredpatternsforsurfaceacousticwavefilters |