Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications
Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by...
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| Format: | Thesis |
| Language: | English |
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2012
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| Online Access: | https://hdl.handle.net/10356/50732 |