Novel design and fabrication of MIM capacitors with alternating connection fingers
In this dissertation project, a series of novel MIM capacitors are designed. A novel process, compatible with GaAs MMICs is developed as well which allows the integration of passive devices and HEMT devices. Detailed description of the full design layout and fabrication process is presented in this...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/51026 |