Process development of nanowires for off-chip interconnects
Nickel nanowires with solder cap are successfully fabricated on the test chip with well defined location. The location of the nanowires on the test chip can be pre-determined by using patterned silicon dioxide as the protective layer. The developed fabrication process of nanowires can be easily adap...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5123 |