Development of massively parallel nanolithography
As technology is becoming more and more advanced every day, lithography techniques are also moving towards nanoscale production of components needed in integrated electronic circuits, micro electrochemical systems (MEMS) and in medical and biology field etc. An ideal lithography method is essential...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Final Year Project (FYP) |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/51499 |