Growth and characterization of amorphous Si based multilayer structures

Growth and characterization of amorphous Si based multilayer structures

Silicon is a widely available material with very good electrical, thermal and mechanical properties suitable for the manufacture of electronic devices and has contributed to the big success of microelectronics. The trend in Si microelectronics towards faster and smaller devices has resulted in many...

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Bibliographic Details
Main Author: Kamyab, Lobna
Other Authors: Yu Mingbin
Format: Thesis
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
DRNTU::Engineering::Materials::Photonics and optoelectronics materials
DRNTU::Engineering::Materials::Material testing and characterization
Online Access:https://hdl.handle.net/10356/52043

Internet

https://hdl.handle.net/10356/52043

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