Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films

On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...

Full description

Bibliographic Details
Main Author: Wang, Chunmei
Other Authors: Li Chuan
Format: Thesis
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/5334