Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...
Main Author: | |
---|---|
Other Authors: | |
Format: | Thesis |
Published: |
2008
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/5334 |