Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or mor...
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/5334 |
| _version_ | 1811695690858889216 |
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| author | Wang, Chunmei |
| author2 | Li Chuan |
| author_facet | Li Chuan Wang, Chunmei |
| author_sort | Wang, Chunmei |
| collection | NTU |
| description | On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or more presenting in nano-scale. In this study, Cu phase acting as the second phase was incorporated into TaN matrix in order to tune the negative TCR of TaN. Experimental results show that annealed TaN thin films have a negative TCR (-850 ppm/ºC) while Cu films would normally give a positive TCR (+4300 ppm/ºC). It seems rather natural that TaN-Cu nanocomposite could demonstrate a near-zero TCR and the experiment result show that when proper Cu concentrations reach to 66 at.%~75 at.%, a zero-TCR could be obtained. |
| first_indexed | 2024-10-01T07:27:29Z |
| format | Thesis |
| id | ntu-10356/5334 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T07:27:29Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/53342023-03-11T17:35:52Z Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films Wang, Chunmei Li Chuan Jang-Hsing Hsieh School of Mechanical and Aerospace Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films On the other hand, nanocomposite thin film shows many special and superior properties that can be used in numerous potential applications, since it is a multi-phase thin film. Nanocomposite thin films can be defined as the thin films that are composed of at least two different phases with one or more presenting in nano-scale. In this study, Cu phase acting as the second phase was incorporated into TaN matrix in order to tune the negative TCR of TaN. Experimental results show that annealed TaN thin films have a negative TCR (-850 ppm/ºC) while Cu films would normally give a positive TCR (+4300 ppm/ºC). It seems rather natural that TaN-Cu nanocomposite could demonstrate a near-zero TCR and the experiment result show that when proper Cu concentrations reach to 66 at.%~75 at.%, a zero-TCR could be obtained. DOCTOR OF PHILOSOPHY (MAE) 2008-09-17T10:48:01Z 2008-09-17T10:48:01Z 2007 2007 Thesis Li, C. (2007). Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5334 10.32657/10356/5334 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Wang, Chunmei Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title | Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title_full | Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title_fullStr | Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title_full_unstemmed | Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title_short | Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films |
| title_sort | electrical and mechanical properties of ta n cu nanocomposite thin films |
| topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | https://hdl.handle.net/10356/5334 |
| work_keys_str_mv | AT wangchunmei electricalandmechanicalpropertiesoftancunanocompositethinfilms |