Selective emitters prepared by high density plasma immersion ion implantation (HD-PIII) in silicon wafer based solar cell

Plasma Ion Immersion Implantation is a rapidly developing modification technique used for doping the near-surface regions of materials by implanting energetic ions from plasma, which will surround the sample in the vacuum chamber. This technique is widely known for its accuracy for dopant concentrat...

Full description

Bibliographic Details
Main Author: Seow, Leslie Kai Tong.
Other Authors: Sun Changqing
Format: Final Year Project (FYP)
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/53370