Finite element analysis of temperature dependence of the piezoresistance of silicon

There is a widespread demand for high-temperature pressure sensors at temperatures above 200 °C and with high-frequency responses. PZT based devices owing to its excellent electrical and mechanical properties at rash environments, is a great candidate for use as an electromechanical sensor for high-...

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Bibliographic Details
Main Author: Wang, Zhao.
Other Authors: Miao Jianmin
Format: Final Year Project (FYP)
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/54158